Ukufuma yimeko eqhelekileyo yolawulo lokusingqongileyo ekusebenzeni kwamagumbi acocekileyo. Ixabiso elijoliswe kulo lomswakama ohambelanayo kwigumbi elicocekileyo le-semiconductor lilawulwa ukuba libe kuluhlu lwe-30 ukuya kwi-50%, ukuvumela ukuba impazamo ibe phakathi koluhlu oluncinci lwe-± 1%, njengendawo ye-photolithographic - okanye nokuba yincinci kwindawo ye-ultraviolet processing (DUV) kude. Kwezinye iindawo, ungaphumla ukuya kuthi ga kwi-±5%.
Ngenxa yokuba ukufuma okuhambelanayo kuneqela lezinto ezinokuthi zibe negalelo ekusebenzeni ngokubanzi kwegumbi elicocekileyo, kuquka:
● ukukhula kwebhaktheriya;
● Uluhlu lwentuthuzelo abasebenzi abavakalelwa ngayo kubushushu begumbi;
● Intlawulo engatshintshiyo iyavela;
● ukubola kwesinyithi;
● Ukujiya komphunga wamanzi;
● ukuthotywa kwelithography;
● Ukufunxwa kwamanzi.
Iintsholongwane kunye nezinye izingcolisi zebhayoloji (umngundo, iintsholongwane, umngundo, amangolwane) zinokuphinda-phinda kwindawo enokufuma okungaphezulu kwama-60%. Ezinye iintyatyambo zinokukhula xa ukufuma okunxulumeneyo kudlula i-30%. Xa ukufuma okunxulumeneyo kuphakathi kwe-40% kunye ne-60%, iziphumo zebhaktheriya kunye nosulelo lokuphefumla lunokuncitshiswa.
Ukufuma okuzalanayo kuluhlu lwe-40% ukuya kwi-60% ikwaluluhlu oluthobekileyo apho abantu baziva bekhululekile. Ukufuma okugqithisileyo kunokwenza abantu bazive bedakumbile, ngelixa ukufuma okungaphantsi kwe-30% kunokwenza abantu bazive besomile, bechachakile, bengakwazi ukuphefumla kunye nokungakhululeki ngokweemvakalelo.
Ukufuma okuphezulu okunene kunciphisa ukuqokelela kwentlawulo ye-static ebusweni begumbi elicocekileyo - esi sisiphumo esifunwayo. Ukufuma okusezantsi kulungele ngakumbi ukuqokelelwa kwentlawulo kunye nomthombo onokuba yingozi wokukhutshwa kwe-electrostatic. Xa ukufuma okuhambelanayo kudlula i-50%, intlawulo ye-static iqala ukutshabalalisa ngokukhawuleza, kodwa xa ukufuma okuhambelanayo kungaphantsi kwe-30%, banokuqhubeka ixesha elide kwi-insulator okanye kwindawo engaphantsi komhlaba.
Ukufuma okunxulumeneyo phakathi kwe-35% kunye ne-40% kunokuba yinto eyanelisayo, kwaye amagumbi okucoca i-semiconductor ngokuqhelekileyo asebenzisa ulawulo olongezelelweyo ukunciphisa ukuqokelelwa kwentlawulo engatshintshiyo.
Isantya seempendulo ezininzi zeekhemikhali, kubandakanywa nenkqubo yokubola, iya kwanda njengoko umswakama ohambelanayo ukhula. Zonke iindawo ezivezwe emoyeni ezijikeleze igumbi elicocekileyo zigutyungelwe ngokukhawuleza ubuncinane be-monolayer yamanzi. Xa le miphezulu yenziwe ngentsimbi encinci enokuthi iphendule ngamanzi, ukufuma okuphezulu kunokukhawulezisa ukusabela. Ngethamsanqa, ezinye izinyithi, ezifana ne-aluminiyam, zinokwenza i-oxide ekhuselayo ngamanzi kwaye ithintele ukusabela okungaphezulu kwe-oxidation; kodwa enye imeko, efana ne-copper oxide, ayikhuseli, ngoko ke Kwiindawo eziphakamileyo zokufuma, iindawo zobhedu zithinteka kakhulu kwi-corrosion.
Ukongeza, kwindawo yomswakama ophezulu, i-photoresist iyandiswa kwaye iyancipha emva komjikelezo wokubhaka ngenxa yokufunxa ukufuma. Ukubambelela kwifotoresist kunokuchaphazeleka kakubi kukufuma okuphezulu; ukufuma okungaphantsi kwesihlobo (malunga ne-30%) kwenza ukunamathela kwe-photoresist kube lula, nangaphandle kwesidingo se-polymeric modifier.
Ukulawula ukufuma okuhambelanayo kwigumbi elicocekileyo le-semiconductor akuyomfuneko. Nangona kunjalo, njengoko ixesha litshintsha, kungcono ukuphonononga izizathu kunye neziseko zeendlela eziqhelekileyo, eziqhelekileyo ezamkelweyo.
Umswakama awunakubonakaliswa ngokukodwa kwinduduzo yethu yomntu, kodwa kaninzi kunempembelelo enkulu kwinkqubo yokuvelisa, ngakumbi apho umswakama uphezulu, kwaye umswakama udla ngowona lawulo olubi kakhulu, yingakho Kwiqondo lokushisa kunye nomswakama wokulawula igumbi elicocekileyo, umswakama ukhethwa.
Ixesha lokuposa: Sep-01-2020